微區XRF（X射線分析顯微鏡）對金屬薄膜的快速厚度測量

微區XRF（X射線分析顯微鏡）對金屬薄膜的快速厚度測量 Energy dispersive X-ray fluorescence(EDXRF) is an ideal technique for fast and non-destructive elemental characterisation of materials. The XGT-5000 combines this with microscopic spatial resolution, offering unique high intensity x-ray beams with diameters ranging from 1.2mm down to 10um. Accurate quantitative and qualitative analysis are possi ble using single pint analysis, whilst elemental imaging results in detailed distribution maps for specified elements.Furthermore, an additional scintillation detector gives access to transmitted x-ray imaging, revea領 inernal structures, even of components embedded in resin. 請發郵件至info-sci.cn@horiba.com，直接索取更多應用案例 X射線熒光分析顯微鏡 X射線熒光分析顯微鏡